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Industrial plasma engineering. Vol. 2. applications to nonthermal plasma processing

Roth, J. Reece (1937-....)

Bristol Philadelphia : Institute of Physics Publishing, 2001

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  • Titre:
    Industrial plasma engineering. Vol. 2. applications to nonthermal plasma processing
  • Auteur: Roth, J. Reece (1937-....)
  • Sujets: Technique des plasmas ;
    Plasmas (gaz ionisés) ;
    Plasma ;
    Matériau ;
    Electronique
  • Description: Mines : Contents : Surface Interactions in Plasma Processing. Atmospheric Pressure Plasma Sources. Vacuum Plasma Sources. Plasma Reactors for Plasma Processing. Specialized Techniques and Devices for Plasma Pprocessing. Parametric Plasma Effects on Plasma Processing. Diagnostics for Plasma Processing. Plasma Treatment of Surfaces. Surface Modification by Implantation and Diffusion. Thin Film Deposition by Evaporative Condensation and Sputtering. Plasma Chemical Vapour Deposition (PCVD). Plasma Etching
  • Éditeur: Bristol Philadelphia : Institute of Physics Publishing
  • Date de publication: 2001
  • Format: XI-645 p. : ill. ; 24 cm
  • Langue: Anglais
  • Identifiant: ISBN 0-7503-0545-2 ;ISBN 0-7503-0544-4
  • Source: Mines ParisTech (catalogue)

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