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A constitutive single crystal model for the silicon mechanical behavior : applications to the stess induced by silicided lines and STI in MOS technology

CACHO, Florian ; ORAIN, S. ; Cailletaud, Georges (1955-....)

Evry : ENSMP, 5002

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  • Titre:
    A constitutive single crystal model for the silicon mechanical behavior : applications to the stess induced by silicided lines and STI in MOS technology
  • Auteur: CACHO, Florian
  • Autre(s) auteur(s): ORAIN, S. ;
    Cailletaud, Georges (1955-....)
  • Sujets: Monocristal ;
    Silicification ;
    Contrainte ;
    Propriété mécanique
  • Description: Mines : Extr. de : "EuroSimE 2005",Proceeedings of the 6th International Conference on Thermal, mechanical and multi-physics simulation and experments in micro-electronics and micro-systems, April 18-20, 2005
  • Éditeur: Evry : ENSMP
  • Date de publication: 5002
  • Format: P. 635-640 : Ill. ; 30 cm
  • Langue: Anglais
  • Source: Mines ParisTech (catalogue)

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