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Method and device for high-speed interferential microscopic imaging of an object

Dubois , Arnaud ; Boccara , Claude , ; Laboratoire de Spectroscopie en Lumière Polarisée ( LSLP ) ; Université Pierre et Marie Curie - Paris 6 ( UPMC ) -ESPCI ParisTech-Centre National de la Recherche Scientifique ( CNRS )

https://hal.archives-ouvertes.fr/hal-01435042

HAL CCSD, 2001

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  • Titre:
    Method and device for high-speed interferential microscopic imaging of an object
  • Auteur: Dubois , Arnaud ;
    Boccara , Claude ,
  • Autre(s) auteur(s): Laboratoire de Spectroscopie en Lumière Polarisée ( LSLP ) ; Université Pierre et Marie Curie - Paris 6 ( UPMC ) -ESPCI ParisTech-Centre National de la Recherche Scientifique ( CNRS )
  • Sujets: [ PHYS.PHYS.PHYS-OPTICS ] Physics [physics]/Physics [physics]/Optics [physics.optics]
  • Fait partie de: https://hal.archives-ouvertes.fr/hal-01435042
  • Description: Déposant : Centre National De La Recherche Scientific (C.N.R.S.)
    A method and a device for interferential microscopic imaging of an object which comprises sending a light beam in each of the arms of a two-wave interferometer, one of the arms comprising the object to be analyzed. The phase is subjected to a sinusoidal modulation to a frequency f. The signal modulation results from mechanical oscillation of an assembly of elements of the interferometer. The interference signal (S) is integrated during the phase variation via a multichannel sensor. A computer enables to record the integrated interference signal obtained during each period fraction 1/n and to calculate, subsequently, the image of the object. The invention is potentially useful for characterizing thin layers, for controlling components in microelectronics, for reading data stored in volume (3D) and objects unstable in time; in biology and in vivo studies.
  • Éditeur: HAL CCSD
  • Date de publication: 2001
  • Langue: Anglais
  • Identifiant: Patent N° : US6940602 B2 ; HAL Id hal--01435042
  • Source: ESPCI Paris (archives ouvertes)

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  • dansscope:(33PSL-CNSAD),scope:(33PSL-EHESS),scope:(33PSL-PSL_OMEKA),scope:(33PSL-MINES),scope:(33PSL-EFEO),scope:(33PSL-CNSMDP),scope:(33PSL-CHIMIE),scope:(33PSL),scope:("DAU"),scope:(33PSL-CDF),scope:(33PSL-ENS),scope:("33PSL-OBSERV"),scope:("33PSL-ESPCI"),scope:(33PSL-CURIE),scope:(33PSL-ENSBA),scope:("33PSL-ENC"),scope:(33PSL-PSL_STAR),scope:(33PSL-PSL_SFX),scope:("33PSL-EPHE"),scope:(33PSL-ENSAD),primo_central_multiple_fe
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